16 results
Self-Aligned Epitaxial Cosi2 Formation From Multilayer Co/Ti-Si(100) by a Two-Step Rta Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 69
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- 1993
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The Influence of an In-Situ Electric Field on H+ and He+ Implantation Induced Defects in Silicon
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- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 105
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- 1993
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Addendum: “Partial agglomeration during Co silicide film formation” [J. Mater. Res. 7, 269 (1992)]
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- Journal of Materials Research / Volume 7 / Issue 11 / November 1992
- Published online by Cambridge University Press:
- 31 January 2011, p. 3159
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- November 1992
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Partial agglomeration during Co silicide film formation
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- Journal of Materials Research / Volume 7 / Issue 2 / February 1992
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- 31 January 2011, pp. 269-272
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- February 1992
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Investigation of Metal Induced Surface Defects in Czochralski Si Following Rapid Thermal Processing by Thermal Wave Modulated Reflectance Method
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- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 81
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- 1991
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Tisi2 Thin Films Formed on Crystalline and Amorphous Silicon
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- MRS Online Proceedings Library Archive / Volume 181 / 1990
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- 25 February 2011, 167
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- 1990
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Kinetics of NiSi Formation by Solid State Diffusion in Pt/NiCr/Si Via Growth of an Amorphous Cr-Rich Barrier Layer
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- MRS Online Proceedings Library Archive / Volume 205 / 1990
- Published online by Cambridge University Press:
- 26 February 2011, 275
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- 1990
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Point Defect Injection and Enhanced Sb Diffusion in Si During Co-Si and Ti-Si Reactions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 209 / 1990
- Published online by Cambridge University Press:
- 26 February 2011, 517
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- 1990
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TiSi2 Thin Films Formed on Crystalline and Amorphous Silicon
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- MRS Online Proceedings Library Archive / Volume 182 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 65
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- 1990
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Temperature Dependent Amorphization of Silicon During Self-Implantation1
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- MRS Online Proceedings Library Archive / Volume 51 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 381
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- 1985
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Dynamic Annealing Phenomena and the Origin of RTA-Induced “Hairpin” Dislocations
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- MRS Online Proceedings Library Archive / Volume 35 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 277
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- 1984
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Germanium Implantation into Silicon: An Alternate Pre-Amorphization/Rapid Thermal Annealing Procedure for Shallow Junction Technology
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- MRS Online Proceedings Library Archive / Volume 23 / 1983
- Published online by Cambridge University Press:
- 22 February 2011, 303
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- 1983
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Fast Scanned Energy Beam Induced Explosive Crystallization of Ion Implantation Amorphized Poly and Single Crystal Silicon Substrates
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- MRS Online Proceedings Library Archive / Volume 4 / 1981
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- 15 February 2011, 547
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- 1981
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Optical, Structural and Electrical Characteristics of Explosively Crystallized Si Thin Films on Glass Substrates
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- MRS Online Proceedings Library Archive / Volume 4 / 1981
- Published online by Cambridge University Press:
- 15 February 2011, 535
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- 1981
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Structural Modifications of Amorphized Silicon Surfaces Following Picosecond Laser Irradiation
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- MRS Online Proceedings Library Archive / Volume 4 / 1981
- Published online by Cambridge University Press:
- 15 February 2011, 177
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- 1981
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Dislocation Nucleation, Growth and Suppression During Cw Laser Annealing of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1 / 1980
- Published online by Cambridge University Press:
- 15 February 2011, 193
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- 1980
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